Properties and optimization of RF-bias-sputtered TiN for the wear reduction of plastic manufacturing tools and components
- 1 December 1988
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 36 (1-2) , 275-282
- https://doi.org/10.1016/0257-8972(88)90157-0
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Investigation of reactively sputtered TiN films for diffusion barriersThin Solid Films, 1986
- R.F. reactively sputtered TiN: Characterization and adhesion to materials of technical interestThin Solid Films, 1984