Growth of cubic boron nitride films by hot filament assisted RF plasma CVD
- 16 May 1994
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 143 (1) , K13-K17
- https://doi.org/10.1002/pssa.2211430127
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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