Enhancement and suppression of the formation of porous silicon

• 1 May 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (3) , 1230-1235
• https://doi.org/10.1116/1.588242

Abstract

Keywords

• ENHANCEMENT AND SUPPRESSION
• SUPPRESSION OF THE FORMATION
• FORMATION OF POROUS SILICON