Classical and novel techniques for the preparation of SnO2 thin-film gas sensors
- 1 January 1992
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 6 (1-3) , 239-247
- https://doi.org/10.1016/0925-4005(92)80062-3
Abstract
No abstract availableKeywords
This publication has 36 references indexed in Scilit:
- Methods for the preparation of NO, NO2 and H2 sensors based on tin oxide thin films, grown by means of the r.f. magnetron sputtering techniqueSensors and Actuators B: Chemical, 1992
- Fast detection of phenylarsine, a comparison of sputtered and sintered SnO2 filmsSensors and Actuators B: Chemical, 1991
- Detection of phenylarsine in airJournal of Crystal Growth, 1991
- Effects of thickness and additives on thin-film SnO2 gas sensorsSensors and Actuators B: Chemical, 1991
- Conductance response of Pd/SnO2 (110) model gas sensors to H2 and O2Sensors and Actuators B: Chemical, 1990
- Some aspects of the interaction of oxygen with polycrystalline SnOx thin filmsSensors and Actuators B: Chemical, 1990
- Gas sensitivity of metal oxide mixed tin oxide films prepared by spray pyrolysisJournal of Materials Science, 1989
- Unique phenomena in SnO2-based gas sensing devices exposed to ammonia gasSolid-State Electronics, 1984
- Thin-film semiconductor NOxsensorIEEE Transactions on Electron Devices, 1979
- Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatingsJournal of Vacuum Science and Technology, 1974