Crystalline silicon on insulators by graphoepitaxy

• 1 January 1979
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 210-212
• https://doi.org/10.1109/iedm.1979.189581

Abstract

Keywords

• SILICON ON INSULATOR
• AMORPHOUS MATERIALS
• THIN FILM
• CRYSTALLIZATION
• CRYSTALLOGRAPHY
• AMORPHOUS MATERIAL
• PREDICTIVE MODELS
• TRANSISTORS