Anomalous Boron Diffusion in Silicon from Planar Boron Nitride Sources

• 1 January 1974
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 121  (5) , 722-724
• https://doi.org/10.1149/1.2401897

Abstract

Keywords

• SILICON
• NITRIDE SOURCES
• PLANAR BORON
• BORON NITRIDE
• ANOMALOUS BORON DIFFUSION