The Growth and Etching of Si through Windows in SiO[sub 2]

• 1 January 1967
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 114  (4) , 381
• https://doi.org/10.1149/1.2426601

Abstract

Keywords

• SUB
• GROWTH AND ETCHING
• ETCHING OF SI
• SI THROUGH WINDOWS
• WINDOWS IN SIO