Perspectives on residual gas analysis

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Abstract
The advent of ultrahigh vacuum in the late 1940’s led to the rapid development of specialized mass spectrometers for the analysis of the gas composition in high vacuum systems. These devices, generally referred to as residual gas analyzers or partial pressure analyzers, have now become almost as prevalent as ionization gauges, and in many instances much more important. A short review of the early types will be presented, and the reasons for the discontinued use of most of them will be discussed. Details of the two instruments currently in dominant use, namely the magnetic sector and the quadrupole, will be presented. Typical applications will be considered. The present status and future directions of partial pressure analyzers will be evaluated.

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