Precise X-ray relative measurement of lattice parameters of silicon wafers by multiple-crystal Bragg-case diffractometry. Computer simulation of the experiment
- 1 June 1992
- journal article
- research article
- Published by International Union of Crystallography (IUCr) in Journal of Applied Crystallography
- Vol. 25 (3) , 424-431
- https://doi.org/10.1107/s0021889892000116
Abstract
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