Ellipsometric Investigations of Boron-Rich Layers on Silicon

• 1 January 1968
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 115  (3) , 291
• https://doi.org/10.1149/1.2411139

Abstract

Keywords

• ELLIPSOMETRIC INVESTIGATIONS
• LAYERS ON SILICON
• INVESTIGATIONS OF BORON
• BORON RICH LAYERS