Surface Protection and Selective Masking during Diffusion in Silicon

• 1 January 1957
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 104  (9) , 547
• https://doi.org/10.1149/1.2428650

Abstract

Keywords

• SILICON
• SURFACE PROTECTION
• SELECTIVE MASKING
• PROTECTION AND SELECTIVE
• MASKING DURING DIFFUSION