Annealing and phase stability of tantalum films sputtered in Ar-O2
- 1 January 1974
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 20 (1) , 103-114
- https://doi.org/10.1016/0040-6090(74)90038-8
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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