New method for determining distribution of interface states in an MIS system
- 1 April 1982
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 18 (7) , 290-292
- https://doi.org/10.1049/el:19820198
Abstract
A general formula for the capacitance transient response in an MIS system was developed in order to apply the ICTS (isothermal capacitance transient spectroscopy) technique to an MIS diode. A new spectroscopic measurement method for determining the distribution of interface states is proposed and applied to an InAs MIS diode.Keywords
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