Combination of LIGA with other microstructure technologies

• 17 October 1996
• journal article
• research article
• Published by Springer Nature in Microsystem Technologies
• Vol. 2  (4) , 162-166
• https://doi.org/10.1007/s005420050036

Abstract

Keywords

• SILICON
• MICROSTRUCTURE
• MOLDING PROCESS
• SERIES PRODUCTION
• PLASTIC MOLDING