Technique for micro-machining millimetre-wave rectangularwaveguide
- 14 May 1998
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 34 (10) , 996-997
- https://doi.org/10.1049/el:19980665
Abstract
A new technique is reported for micro-machining millimetre-wave rectangular waveguide components. S-parameter measurements on these structures show that they achieve lower loss than those produced using any other on-chip fabrication technique, have highly accurate dimensions, are physically robust, and are cheap and easy to manufacture.Keywords
This publication has 6 references indexed in Scilit:
- Automotive radar at 80-90 GHzPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- W-band measurements of 100 μm height micro-machined air-filled rectangular waveguidesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- New Directions in Terahertz TechnologyPublished by Springer Nature ,1997
- Terahertz waveguide components fabricated usinga 3D x-ray microfabrication techniqueElectronics Letters, 1996
- 0.1 THz rectangular waveguide on GaAs semi-insulatingsubstrateElectronics Letters, 1995
- Novel transmission lines for the submillimeter-wave regionProceedings of the IEEE, 1992