Scattering of Metastable Molecules from a Gas-Covered (100) Surface of Germanium

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Abstract
Studies have been made of the scattering and deexcitation of thermal energy beams of metastable Ar, He, Ne, and N2 from an oxygen-covered germanium surface. It has been found that the survival of incident metastable species after a surface collision is strongly dependent on the degree of surface gas coverage. Using the metastable time-of-flight technique, both angular scattering and time-of-flight distributions were measured for the scattered metastable species. Changes in the TOF distribution of the scattered molecules relative to the incident distribution have been observed. In addition, changes in angular distribution as well as total metastable survival have been observed as a function of incident angle. Differences in survival for the various species studied have been measured and are discussed in terms of the excitation energy of the excited electron in the metastable atom relative to unfilled energy states at the germanium surface.

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