Broadening of fine electron beams by multiple scattering in thin films made visible in the emission microscope
- 18 December 1972
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 42 (4) , 307-308
- https://doi.org/10.1016/0375-9601(72)90434-3
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Computer-controlled resist exposure in the scanning electron microscopeIEEE Transactions on Electron Devices, 1972
- Monte Carlo Calculations on Electron Scattering in a Solid TargetJapanese Journal of Applied Physics, 1971
- NEW METHOD OF OBSERVING ELECTRON PENETRATION PROFILES IN SOLIDSApplied Physics Letters, 1971
- Scattering of Highly Focused Kilovolt Electron Beams by SolidsJournal of Applied Physics, 1969
- A High-Resolution Scanning Transmission Electron MicroscopeJournal of Applied Physics, 1968
- Messung des differentiellen elastischen Wirkungsquerschnitts für Elektronenstreuung an freien SilberatomenThe European Physical Journal A, 1966
- Die Ortsverteilung mittelschneller Elektronen bei MehrfachstreuungThe European Physical Journal A, 1963
- The Theory of Small-Angle Multiple Scattering of Fast Charged ParticlesReviews of Modern Physics, 1963
- Die Vielfachstreuung der Elektronen zu großen WinkelnThe European Physical Journal A, 1959
- Molière's Theory of Multiple ScatteringPhysical Review B, 1953