Infrared and ellipsometric studies of amorphous hydrogenated carbon films
- 15 March 1991
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (6) , 3719-3722
- https://doi.org/10.1063/1.348464
Abstract
Amorphous hydrogenated carbon films have been deposited on a powered electrode by decomposition of acetylene in an rf discharge. Infrared and spectroscopic ellipsometry have been used to study the bonding characteristics and optical properties of these films. The films possess a mixture of bonding configurations which are very sensitive to discharge conditions. Large changes in refractive index and extinction coefficients have been observed. These changes are associated with ion-induced structural modifications and hydrogen incorporation during the deposition process.This publication has 8 references indexed in Scilit:
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