Silicon Nitride Thin Film Dielectric

• 1 January 1960
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 107  (2) , 98
• https://doi.org/10.1149/1.2427642

Abstract

Keywords

• SILICON NITRIDE
• NITRIDE THIN FILM
• THIN FILM DIELECTRIC