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Damping Control of MEMS Devices Using Structural Design Approach
Home
Publications
Damping Control of MEMS Devices Using Structural Design Approach
Damping Control of MEMS Devices Using Structural Design Approach
CC
C.-L. Chen
C.-L. Chen
JY
J.J. Yao
J.J. Yao
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3 June 1996
proceedings article
Published by
Transducer Research Foundation Inc. (TRF)
p.
72-75
https://doi.org/10.31438/trf.hh1996.17
Abstract
No abstract available
Cited
Cited by 1 article
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