X-Ray Photoelectron Spectroscopy of Micrometer-Size Surface Area Using Synchrotron Radiation
- 1 June 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (6A) , L1026
- https://doi.org/10.1143/jjap.29.l1026
Abstract
An axisymmetric Wolter type I mirror was used at a synchrotron radiation beamline in order to produce a focused X-ray beam with a photon energy of 150 eV. An FWHM (full width at half maximum) of 4 µm was achieved in the beam intensity profile. A Si(2p) XPS spectrum was then observed for a Si sample with this focused beam. This is the first microscopic XPS measurement in the micrometer range that has been achieved using a Wolter type mirror.Keywords
This publication has 15 references indexed in Scilit:
- Fabrication of an Axisymmetric Wolter Type I Mirror with a Gold Deposited Reflecting SurfaceJapanese Journal of Applied Physics, 1989
- Higher-harmonics suppressor for soft x raysReview of Scientific Instruments, 1989
- High spatial resolution at very high sensitivity using synchrotron radiation excited XPSReview of Scientific Instruments, 1989
- Submicrometer-resolution photoelectron-spectroscopy at MAX LabReview of Scientific Instruments, 1989
- Development of a scanning x-ray microprobe with synchrotron radiationReview of Scientific Instruments, 1989
- Soft x-ray monochromator with a varied-space plane grating for synchrotron radiation: design and evaluationApplied Optics, 1989
- Imaging Characteristics of a Replicated Wolter Type. I. X-Ray Mirror Designed for Laser Plasma DiagnosticsJapanese Journal of Applied Physics, 1987
- Photoelectron spectromicroscopyNature, 1981
- Soft x-ray imaging with toroidal mirrorsApplied Optics, 1978
- Verallgemeinerte Schwarzschildsche Spiegelsysteme streifender Reflexion als Optiken für RöntgenstrahlenAnnalen der Physik, 1952