Influence of finite metal overlayer resistance on the evaluation of contact resistivity
- 1 September 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 33 (9) , 1401-1403
- https://doi.org/10.1109/T-ED.1986.22683
Abstract
To determine contact parameters, TLM methods are widely used. Their general usage assumes the sheet resistance of metal overlayer to be zero. This work shows the error obtained by accepting this assumption. Computer modeling was carried out to determine the deviation caused by this assumption.Keywords
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