Ion implantation and laser annealing
- 1 July 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 186 (1-2) , 189-192
- https://doi.org/10.1016/0029-554x(81)90905-8
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Cohesion of solids under laser irradiationApplied Physics Letters, 1980
- Epitaxial regrowth of Ne- and Kr-implanted amorphous siliconJournal of Applied Physics, 1978
- Comparative study of annealed neon-, argon-, and krypton-ion implantation damage in siliconJournal of Applied Physics, 1978
- The application of diffusion theory to inert-gas motion in ion-bombarded solids: Diffusion theory for discrete media, part IIIJournal of Nuclear Materials, 1966