Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers
- 1 January 2000
- journal article
- Published by Institute of Electrical Engineers of Japan (IEE Japan) in IEEJ Transactions on Sensors and Micromachines
- Vol. 120 (11) , 493-497
- https://doi.org/10.1541/ieejsmas.120.493
Abstract
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