Microscale to nanoscale ferroelectric domain and surface engineering of a near-stoichiometric LiNbO3 crystal

We have investigated microscale to nanoscale ferroelectric domain and surface engineering of a near-stoichiometric ${\mathrm{LiNbO}}_3$ crystal by using scanning force microscopy. The single crystals ${\mathrm{LiNbO}}_3$ fixed on metal substrates were polished to a 5 μm thickness. Artificial patterns of inverted-domain structures were fabricated in the samples, where polarization directions of the domains were switched by scanning the samples with a conductive cantilever while applying voltages. Furthermore, the negatively polarized surfaces in the patterns were preferentially etched in HF solution. As a result, cavity and mound-shaped surfaces were fabricated; these structures could be used to create functional templates and devices.