Realization of hollow SiO2 micronozzles for electrical measurements on living cells
- 23 December 2002
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 81 (26) , 5063-5065
- https://doi.org/10.1063/1.1528292
Abstract
We present a microfluidic device for the immobilization and electrical measurements, such as patch-clamp or impedance measurements, on individual living cells. Micron-sized hollow nozzles are realized in Si wafers using a deep plasma etching process. The micronozzles are integrated with glass wafers containing microfluidic channels and Ag/AgCl electrodes. Reliable cell positioning on the nozzles via hydrodynamic forces is obtained. Relevant electrical parameters of the system, especially seal resistances between attached cells and the nozzle, are determined.
Keywords
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