Performance of the reflected beam sputter source
- 1 January 1977
- journal article
- Published by EDP Sciences in Revue de Physique Appliquée
- Vol. 12 (10) , 1453-1457
- https://doi.org/10.1051/rphysap:0197700120100145300
Abstract
The reflected beam sputter source is a modification of a Hiconex 834 sputter source. Instead of target cones small cylindrical pills of target material are being used which are bombarded by the reflected cesium beam. Some output data, results on transmission and emittance measurements are presented. The source turns out to be superior to the original in most propertiesKeywords
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