In search of high-performance resists for 50 kV shaped-beam exposure

• 1 November 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (6) , 2539-2544
• https://doi.org/10.1116/1.588389

Abstract

Keywords

• SHAPED BEAM
• BEAM EXPOSURE
• KV SHAPED
• PERFORMANCE RESISTS
• SEARCH OF HIGH