Formation of high T c superconducting films by organometallic chemical vapor deposition
- 16 May 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (20) , 1743-1745
- https://doi.org/10.1063/1.99719
Abstract
The first growth of superconducting YBaCuO films by organometallic chemical vapor deposition is described. Metal β-diketonates were decomposed thermally on MgO substrates in an oxygen-rich atmosphere to produce amorphous brown films. Subsequent annealing in oxygen yielded dull gray films whose thickness corresponded to deposition rates of approximately 8 nm min−1. These films showed semiconductor-like behavior at higher temperatures, followed by a broad resistive transition from 80 to 36 K with the resistance becoming zero at ∼20 K. Analysis of x-ray data indicated the presence of the orthorhombic superconducting phase and various other metal oxides. Profilometer measurements yielded film thicknesses up to 950 nm, and scanning electron microscopy revealed faceted grains from 0.5 to 1.0 μm in size.Keywords
This publication has 14 references indexed in Scilit:
- Y1Ba2Cu3O7−δ thin films grown by a simple spray deposition techniqueApplied Physics Letters, 1988
- Formation of thin-film high T c superconductors by metalorganic depositionApplied Physics Letters, 1987
- Epitaxial ordering of oxide superconductor thin films on (100) SrTiO3 prepared by pulsed laser evaporationApplied Physics Letters, 1987
- Structural and superconducting properties of orientation-ordered films prepared by molecular-beam epitaxyPhysical Review B, 1987
- Superconducting Y-Ba-Cu-O oxide films by sputteringApplied Physics Letters, 1987
- Thin superconducting oxide filmsPhysical Review B, 1987
- Thin film studies of oxides by the organometallic-CVD techniqueProgress in Crystal Growth and Characterization, 1983
- Fractional sublimation of various metal chelates of dipivaloylmethaneAnalytica Chimica Acta, 1972
- Fractional sublimation of the β-diketone chelates of the lanthanide and related elementsAnalytica Chimica Acta, 1968
- Volatile Rare Earth ChelatesJournal of the American Chemical Society, 1965