Application of aluminum nitride films for electronic devices
- 31 March 1999
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 8 (2-5) , 369-372
- https://doi.org/10.1016/s0925-9635(98)00412-9
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Field emitters based on Si tips with AlN coatingDiamond and Related Materials, 1998