Synthesis and characterization of gallium thiocarboxylates as novel single-source precursors to gallium sulfide thin films by aerosol-assisted CVD
- 1 January 1996
- journal article
- Published by Royal Society of Chemistry (RSC) in Chemical Communications
- No. 15,p. 1733-1734
- https://doi.org/10.1039/cc9960001733
Abstract
The first example of a structurally characterized gallium thiocarboxylate compound, Ga(SCOMe)2Me(dmpy) 1 (dmpy = 3,5-dimethylpyridine), is synthesized and used to deposit high-purity, crystalline gallium sulfide thin films by aerosol-assisted chemical vapour deposition at low temperatures.Keywords
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