The effect of gas scattering on the deposition profile of optical thin films

• 1 September 1987
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 5  (5) , 2898-2901
• https://doi.org/10.1116/1.574261

Abstract

Keywords

• THIN FILMS
• GAS SCATTERING
• DEPOSITION PROFILE
• OPTICAL THIN
• EFFECT OF GAS