A Method for the Deposition of SiO[sub 2] at Low Temperatures

• 1 January 1961
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 108  (11) , 1070
• https://doi.org/10.1149/1.2427951

Abstract

Keywords

• LOW TEMPERATURES
• SUB
• DEPOSITION OF SIO
• METHOD FOR THE DEPOSITION