An Electron Transport Model for the Prediction of X-Ray Production and Electron Backscattering in Electron Microanalysis
- 1 November 1966
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 37 (12) , 4429-4433
- https://doi.org/10.1063/1.1708054
Abstract
An electron transport equation has been applied to the case of electron—specimen interaction, which is associated with the problems in electron microanalysis. It has been solved numerically to predict the distribution in depth of x‐ray production , the x‐ray absorption correction factor f(χ), and the distribution in energy and angle of electrons backscattered. These results are compared with available experimental data for Al, Cu, and Au.
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