Abstract
An electron transport equation has been applied to the case of electron—specimen interaction, which is associated with the problems in electron microanalysis. It has been solved numerically to predict the distribution in depth of x‐ray production [open phi](ρx) , the x‐ray absorption correction factor f(χ), and the distribution in energy and angle of electrons backscattered. These results are compared with available experimental data for Al, Cu, and Au.