Reexamination of Some Aspects of Thermal Oxidation of Silicon

• 1 January 1974
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 121  (8) , 1107
• https://doi.org/10.1149/1.2401986

Abstract

Keywords

• THERMAL OXIDATION OF SILICON
• REEXAMINATION
• ASPECTS OF THERMAL OXIDATION