a-Si:H thin film microstructure influenced by HOMOCVD-process parameters

• 30 November 1993
• journal article
• Published by Elsevier in Solar Energy Materials and Solar Cells
• Vol. 31  (2) , 301-306
• https://doi.org/10.1016/0927-0248(93)90061-7

Abstract

Keywords

• THIN FILM
• MICROSTRUCTURES

Funding Information

• Ministry of Education and Science (F-247)