Continuous electron stimulated desorption using a ZrO2/Ag permeation membrane
- 1 May 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (3) , 2087-2089
- https://doi.org/10.1116/1.575976
Abstract
During the development of an atomic oxygen beam generator for laboratory simulation of the atmospheric conditions in low Earth orbit, a new technique for performing electron stimulated desorption (ESD) in a continuous manner has been developed. In this technique, oxygen permeates through a Ag membrane at elevated temperature thereby providing a continuous supply of oxygen atoms to the 1000-Å ZrO2 coating at the vacuum interface. ESD then results in a large peak of neutral O2 molecules which ultimately decays into steady-state desorption. The ESD signal is linear with respect to primary beam flux (3.5×10−2 O2 molecules per electron at a primary beam energy of 1 keV) but nonlinear with respect to primary beam energy.Keywords
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