Application of a thermal field emission source for high resolution, high current e-beam microprobes

Publisher Website
Google Scholar
Abstract
A thermal field emission electron source has been incorporated into a microprobe with two magnetic lenses to produce a 0.10 μm beam spot with 0.11 μA current at 12 kV and a working distance of 13 cm, in agreement with calculated performance assuming a source angular intensity of 1 mA sr−1. The power density and brightness of the beam on the target were 1.6×107 W cm−2 and 5.5×107 A cm−2 sr−1 respectively. The emitter used was 〈100〉 oriented W coated with Zr, operated at 1800 K. Probe current fluctuations (〈ΔI2〉)1/2/IP =0.23% in the frequency interval 1–5000 Hz were measured at the target with I=30 nA. The microprobe was used to construct a scanning Auger microscope which produced submicron resolution Auger elemental maps with scan times of 5 min or less.

This publication has 0 references indexed in Scilit: