Some Characteristics of a Micro-Mechanical Resonator Integrated with Laser Diodes by AlGaAs/GaAs Micromachining.
- 1 January 1993
- journal article
- Published by Japan Society for Precision Engineering in Journal of the Japan Society for Precision Engineering
- Vol. 59 (9) , 1560-1565
- https://doi.org/10.2493/jjspe.59.1560
Abstract
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