Lifetime of Thin Film Heater at High Temperature

• 1 October 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (10) , 1867-1868
• https://doi.org/10.1143/jjap.16.1867

Abstract

Keywords

• HIGH TEMPERATURE
• LIFETIME
• THIN FILM HEATER
• HEATER AT HIGH