Device Application and Growth Mechanism for Hemispherical-Grained Si.

Publisher Website

1 January 1991

journal article
Published by Springer Nature in MRS Proceedings

Vol. 219
https://doi.org/10.1557/proc-219-401

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

High performance low-temperature poly-Si n-channel TFTs for LCD
IEEE Transactions on Electron Devices, 1989