Nanoscale determination of phase velocity by scanning acoustic force microscopy
- 15 June 1997
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 55 (23) , 15852-15855
- https://doi.org/10.1103/physrevb.55.15852
Abstract
We measured the phase velocity of surface acoustic waves (SAW's) with a scanning acoustic force microscope (SAFM) and achieved a maximum lateral resolution of 19.9 nm. The phase measurement of high-frequency waves with a slowly responding SAFM cantilever was perfomed by frequency mixing at its nonlinear force curve. For Au layers of different thicknesses the SAW dispersion was studied on a lateral scale of 200 nm and compared to calculated data.Keywords
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