Progress Toward MMIC On-wafer Standards
- 1 November 1990
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 18, 73-83
- https://doi.org/10.1109/arftg.1990.323998
Abstract
A prototype standard set in coplanar waveguide suitable for the calibration of wafer probe stations has been developed through a cooperative effort between the National Institute of Standards and Technology and a MIMIC Phase 3 team. The coplanar standard set is intended primarily for in-process testing, although the characterization of coplanar waveguide circuits is also possible. In this paper two sources of systematic errors associated with the prototype standard set, the propagation of undesirable modes, and the influence of adjacent structures on the electrical connection to the elements of the standard set, will be discussed.Keywords
This publication has 3 references indexed in Scilit:
- A new mode-coupling effect on coplanar waveguides of finite widthPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Multi-Line Calibration for MMIC MeasurementPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- MMIC Package Characterization with Active LoadsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990