Process Integration Of Low-Dielectric-Constant Materials

Publisher Website

1 January 1995

journal article
Published by Springer Nature in MRS Proceedings

Vol. 381
https://doi.org/10.1557/proc-381-197

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Passivation Design / Electromigration Performance Correlations in Layered Aluminum Metallizations
MRS Proceedings, 1994
Process Integration and Manufacturasility Issues for High Performance Multilevel Interconnect
MRS Proceedings, 1994