Mass spectrometric study of tetraethoxysilane and tetraethoxysilane–oxygen plasmas in a diode type radio-frequency reactor
- 1 July 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 10 (4) , 1407-1413
- https://doi.org/10.1116/1.578258
Abstract
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