Ion microprobe system at Waseda University for semiconductor analysis
- 1 March 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 54 (1-3) , 71-74
- https://doi.org/10.1016/0168-583x(91)95493-w
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Application of microbeam analysis of biomedical samplesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Ion microbeam applications in semiconductorsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988