Comparative study of the elastic properties of silicate glass films grown by plasma enhanced chemical vapor deposition
- 1 November 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 14 (6) , 3460-3464
- https://doi.org/10.1116/1.588780
Abstract
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