X‐Ray Measurement of Residual Stresses in Textured Thin Coatings

Abstract
The X-ray diffraction technique is a well known non-destructive method to determine the residual stress level in a material. The most commonly used method is the 'd-sin2Ψ' method. However for textured materials and very thin coatings (0.1 .. 2 μm), this method can no longer be applied as will be shown. Therefore, a new measurement method, based on the glance angle technique has been developed.

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