Influence of the Cure Process on the Properties of Hydrogen Silsesquioxane Spin-On-Glass

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1 January 1996

journal article
Published by Springer Nature in MRS Proceedings

Vol. 443
https://doi.org/10.1557/proc-443-195

Abstract

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Keywords

This publication has 1 reference indexed in Scilit:

Low Dielectric Constant Interlayer Using Fluorine-Doped Silicon Oxide
Japanese Journal of Applied Physics, 1994