Analytical Electron Microscopy Of Multilayered Thin Films Using Microcleavage
- 1 August 1986
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 25 (8) , 258948
- https://doi.org/10.1117/12.7973934
Abstract
Microcleavage transmission electron microscopy (MTEM) has been applied to the study of many properties of multilayered samples. We illustrate the unique capabilities of this technique for obtaining a detailed structural picture of the multilayer in order to study long-range perpendicular thickness drifts, lateral variations, roughness, substrate quality, adherence, thermal stability, composition, and crystallinity.Keywords
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